| MTU区域I/O | |||
| 编号 | I/O位置 | 电路号 | 信号名 |
| 1 | X00B | 34LS-1 | Side2TapeBoxChk Side 2废料带箱确认 |
| 2 | X018 | 35LS-5 | TrayPaleHeightChk1 料盘托架高度确认 1 |
| 3 | X019 | 35LS-6 | TrayPaleHeightChk2 料盘托架高度确认 2 |
| 4-1 | X01F | 35LS-15 | Side2PartSupCovChk Side 2元件供应单元盖板确认 |
| 4-2 | 35LS-16 | ||
| 5 | RX030 | 35LS-1 | MTU ShuttleRetChk MTU 往复臂后退端确认 |
| 6 | RX031 | 35LS-2 | MTU PalletAdvChk MTU 供料托架前进端确认 |
| 7-1 | RX032 | 35LS-20R 35LS-21R 35LS-22R 35LS-23R 35LS-24R | TrayRemoveChk 空料盘排出确认(受光)(备注) |
| 7-2 | 35LS-20T 35LS-21T 35LS-22T 35LS-23T 35LS-24T | TrayRemoveChk 空料盘排出确认(照射光)(备注) | |
| 8 | RX033 | 35LS-4R | MTUAutoToolRiseChk MTU 自动更换头浮起确认 |
| 9 | RX035 | 35LS-6R | MTU PalletAdvHeightChk1 MTU 供料托架前进高度确认1 |
| 10 | RX036 | 35LS-7R | MTU_PalletAdvHeightChk2 MTU供料托架前进高度确认2 |
| 11 | RX038 | 35LS-8 | MTU_FrShutOpenChk MTU前侧快门打开确认 |
| 12 | RX03A | 85LS-10 | MTU RrShutCloseChk MTU后侧快门关闭确认 |
| 13 | RX03B | 35LS-13 | MTU PalletPassChk MTU供料托架通过确认 |
| 14 | RX03C | 35LS-12 | MTU PalletRetChk MTU供料托架后退端确认 |
| 15 | RX03D | 35LS-14R | MTU Interlock MTU联锁(受光) |
| 16 | RX04A | 35LS-11 | MTU BTU SafetyDoorChk MTU/BTU 安全门关闭确认 |
| 其他输出项 | |||
| 编号 | 信号名 | 电路板名 | 含义 |
| - | RY009: | FH1304R-0 | InLifterup IN升降台 |
| - | RY00A: | FH1304R-0 | OutLifterup OUT升降台 |
| - | RY00A: | FH1304R-0 | MainpaneIStopperOn 停板挡板 |
| - | Y00C: | FH1304D-0 | AutoTooIReIease |
| - | Y00E: | FH1304D-0 | AirBIow |